The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2000
Filed:
Mar. 25, 1998
Applicant:
Inventors:
Gunther Schindler, Munchen, DE;
Walter Hartner, Munchen, DE;
Volker Weinrich, Munchen, DE;
Carlos Mazure-Espejo, Zorneding, DE;
Assignee:
Infineon Technologies AG, Munich, DE;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
438386 ; 438387 ; 438396 ; 438243 ; 438244 ; 438253 ;
Abstract
A production process for a capacitor electrode formed of a platinum metal includes producing a conductive electrode body on a substrate having a silicon-containing surface for the capacitor electrode. Platinum is deposited over the full surface, the platinum is silicized in a temperature step outside the electrode body and the platinum silicide is removed. The advantage of the invention is the avoidance of an etching process for metallic platinum.