The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2000
Filed:
Nov. 20, 1998
Masaru Sanada, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
A semiconductor device manufacturing process diagnosis system including a visual inspection device for detecting a physically abnormal part of a semiconductor device to be diagnosed, an LSI tester for measuring electrical characteristics of a semiconductor device and a diagnosis device and characterized in that the diagnosis device extracts, from among circuit blocks constituting a semiconductor device, a block contained in a predetermined region covering a physically abnormal part, determines whether an extracted block and an abnormal block causing abnormality of electrical characteristics are the same, with respect to a block discriminated as an abnormal block, detects a position causing abnormality of electrical characteristics within the block, and depending on whether a detected position substantially coincides with a physically abnormal part, determines whether abnormality of electrical characteristics derives from physical abnormality.