The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2000
Filed:
Jun. 04, 1998
Applicant:
Inventors:
Mehran Mehregany, Pepper Pike, OH (US);
Narayanan Rajan, Cleveland, OH (US);
Christian A Zorman, Euclid, OH (US);
Assignee:
Case Western Reserve University, Cleveland, OH (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B29C / ; B29C / ; C25F / ; C23F / ; C23F / ;
U.S. Cl.
CPC ...
264162 ; 264 81 ; 264 82 ; 264219 ; 264221 ; 264317 ; 264341 ; 216-2 ; 216 39 ; 216 47 ; 216 52 ; 216 99 ;
Abstract
A method for molding high precision components is provided that allows inexpensive, rapid fabrication of components using a process involving a silicon substrate, in which the mold pattern is created using multiple mask layers, a deep reactive ion etch process and photolithographic patterning techniques.