The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2000
Filed:
Jan. 19, 1999
Applicant:
Inventors:
Danny Kenny, Sherman, TX (US);
Keith Lindberg, Sherman, TX (US);
Assignee:
MOS EPI, Inc., Sherman, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B / ;
U.S. Cl.
CPC ...
451 59 ; 451 36 ;
Abstract
A system and method for using solid-phase water scrub to remove defects from a wafer surface is disclosed. The method includes the steps of placing the wafer proximate to a frozen substrate and moving the wafer relative to the frozen substrate, thereby causing a portion of the frozen substrate to liquefy. As a result, defects are effectively removed from the wafer's surface.