The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2000
Filed:
Jun. 24, 1999
Aisin Seiki Kabushiki Kaisha, Kariya, JP;
Abstract
An angular velocity sensor includes coupling beams supported afloat by highly flexible support beams so as to be movable relative to a substrate, with the support beams being flexible in the x-axis and a y-axis directions and being symmetrical with respect to the center of the sensor. A first vibrator and a second vibrator are supported by respective coupling beams through spring beams that are highly flexible in the x-direction, with the spring beams being symmetrical with respect to the x-axis passing through the center symmetrical to each other with respect to the y-axis passing through the center. Drive electrodes drive at least one of the first vibrator and the second vibrator to vibrate in the x-direction. First displacement detection electrodes detect a y-directional vibration of the first vibrator and second displacement detection electrodes detect a y-directional vibration of the second vibrator. Precision with respect to detecting the angular velocity is prevented from being lowered by electrical and mechanical disturbances.