The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2000
Filed:
Jan. 20, 1998
Applicant:
Inventors:
Takehiko Hamada, Tokyo, JP;
Masayuki Hamada, Tokyo, JP;
Assignee:
NEC Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
257797 ; 257620 ; 438401 ; 438462 ;
Abstract
A contact alignment mark (18A) is provided in an interlayer insulating film (17), and a wiring alignment mark (19A) is formed above a gate alignment mark (15A) so that the size of the wiring alignment mark (19A) is slightly larger than the gate alignment mark (15A). At the same time, all the other alignment marks at the lower side are shielded by a shield film (19S). All the alignment marks at the lower side are shielded by the opaque alignment mark and the opaque shield film, whereby the alignment marks can be successively formed while stacked on one another.