The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2000
Filed:
Jul. 19, 1996
Applicant:
Inventors:
Steven Verhaverbeke, Radnor, PA (US);
Christopher F McConnell, Berwyn, PA (US);
Charles F Trissel, West Chester, PA (US);
Assignee:
CFMT, Inc., Wilmington, DE (US);
Primary Examiner:
Int. Cl.
CPC ...
B08B / ;
U.S. Cl.
CPC ...
134 26 ; 134 10 ; 134 951 ; 216 99 ; 438689 ; 438698 ; 438704 ; 438706 ; 438734 ; 438749 ; 156345 ;
Abstract
The present invention is directed to wet processing methods for the manufacture of electronic component precursors, such as semiconductor wafers used in integrated circuits. More specifically, this invention relates to methods, for example, prediffusion cleaning, stripping, and etching of electronic component precursors using sequential chemical processing techniques.