The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2000
Filed:
Sep. 08, 1997
William N Carr, Montclair, NJ (US);
Roxburgh Ltd., Douglas, GB;
Abstract
A surface micromachined microaccelerometer includes a substrate which has a surface plane, and a cantilever formed on the substrate with a fixed end and a free end, the fixed end being anchored to the substrate. The cantilever includes a mass fixed along the length of the cantilever. A cooperating device reads out the occurrence of an acceleration event when the free end of the cantilever has moved to a predetermined position. The cooperating device may be fixed or an opposing co-aligned cantilever structure. In a first embodiment, the cooperating device takes the form of a fixed structure having slots in which the tip of the cantilever is selectively retained. A further embodiment configures the cooperating device as an overlapping opposed cantilever. A further feature of the invention enables a reset function of a latched cantilever and comprises a pair of layers which when energized cause a cantilever to be suitably deflected so as to return from the latched state back to the unlatched state.