The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2000
Filed:
Jul. 07, 1998
Applicant:
Inventors:
Katsumi Amano, Fukuoka, JP;
Tashiro Arai, Kanagawa, JP;
Assignees:
Mitsui High-tec Inc., Fukuoka, JP;
Nippon Pneumatics/Fluidics System Co., Ltd., Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; C30B / ;
U.S. Cl.
CPC ...
118716 ; 118715 ; 118718 ; 118719 ; 117 88 ; 117204 ; 134 60 ; 134 61 ; 1341022 ; 134902 ;
Abstract
A spherical object transport apparatus of the invention brings a spiral stream into contact with a first atmosphere containing a spherical object, selectively sucks the first atmosphere outward so as to engulf in the spiral stream for diffusing the first atmosphere outward, guides the spherical object so that the spherical object passes through the center of the transport apparatus, supplies a second atmosphere to the spherical object, and sends the spherical object together with the second atmosphere to the following step.