The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2000
Filed:
Feb. 24, 1999
Kazuyoshi Fushinobu, Tokyo, JP;
Tokyo Institute of Technology, Tokyo, JP;
Abstract
A micro-electromechanical device, such as a micro-sensor or micromachine, includes a movable part in the form of a cantilever or diaphragm, which is formed on a substrate. In order to recover stiction in which the movable part is fixedly adhered to the substrate, a heating element is provided on a surface of the substrate which is opposed to the movable part. The heating element can be operated upon occurrence of stiction, so as to generate heat and thereby separate the movable part from the substrate and assure a proper operation of the device. The device can be produced at a relatively low cost, and achieves a stiction recovery with a high reliability, even when the device is enclosed in a package.