The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2000
Filed:
Mar. 04, 1998
Yasushi Kinoshita, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
To provide a check pattern whereby whether via-hole openings are made correctly or not can be examined without needing high precision positioning of the via-holes, a check pattern of the invention comprises: a check wiring (3) configured on a semiconductor substrate (2), an insulation film (4) formed on the semiconductor substrate (2) to cover the check wiring; and a pair of via-holes (6) each configured at each end of the check wiring (3), said each (6) positioned slightly shifted inversely with each other from a center line in a width direction of the check wiring (3), and a bottom of said each (6) being positioned to traverse both the check wiring (3) and the insulation film (4).