The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2000
Filed:
Dec. 30, 1997
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A vibrating type angular velocity sensor is comprised of: a driving vibrator element 8 supported by a first beam 9 fixed by an anchor portion 3 on a substrate, and driven by a driving comb electrode 12 along an X-axial direction parallel to the substrate; a detecting vibrator element 10 supported by a second beam 11 on the driving vibrator element and being vibratable along a Y-axial direction; and detection electrodes 14 and 15 of an electric capacitance provided with separated from the detecting vibrator element, and the detection electrodes along the X-axial direction, whereby an angular velocity while setting a Z-axial direction perpendicular to the substrate as an axis is detected. Furthermore, the driving vibrator element is fixed on the substrate by way of two sets of the anchor portions arranged at positions symmetrical to each other with respect to the detecting vibrator element. Also, one of the detection electrodes is arranged on the detecting vibrator element, and the other of the detection electrodes is arranged on the driving vibrator element with separated from each other by an equi-interval space.