The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2000
Filed:
Jul. 17, 1998
Applicant:
Inventors:
Atsushi Kubo, Matsubara, JP;
Hirochika Ueyama, Hirakata, JP;
Assignee:
Koyo Seiko Co., Ltd., Osaka, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F25D / ;
U.S. Cl.
CPC ...
4174234 ; 417 63 ; 41742312 ;
Abstract
In a turbo molecular pump having a rotor magnetically supported in a non-contact manner by a magnetic bearing, a pump controller has a magnetic bearing controller having a programmable digital signal processor. This digital signal processor not only controls the magnetic bearing, but also controls the heater, thus serving as a temperature regulator.