The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2000
Filed:
Dec. 31, 1997
Applicant:
Inventors:
Timothy R Demmin, Grand Island, NY (US);
Matthew H Luly, Lancaster, NY (US);
Mohammed A Fathimulla, Ellieott City, MD (US);
Assignee:
AlliedSignal Inc, Morristown, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K / ; C09K / ;
U.S. Cl.
CPC ...
252 794 ; 252 791 ; 252 793 ; 510108 ; 510405 ; 570123 ; 570124 ;
Abstract
A method of etching comprising subjecting a material under plasma etching conditions to an etching composition comprising at least an etchant compound having the formula C.sub.X H.sub.C F.sub.Z