The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 19, 2000

Filed:

Apr. 16, 1998
Applicant:
Inventors:

Ryohei Aihara, Chigasaki, JP;

Kazuaki Endoh, Chigasaki, JP;

Katsuyuki Tsugita, Chigasaki, JP;

Assignee:

Seimi Chemical Co., Ltd., Chigasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K / ; C09C / ; C09G / ;
U.S. Cl.
CPC ...
51309 ; 51307 ; 106-3 ; 438693 ; 423263 ;
Abstract

A polishing agent for semiconductor, comprising cerium oxide particles having a weight average particle size of from 0.1 to 0.35 .mu.m and a crystallite size of from 150 to 600 .ANG..


Find Patent Forward Citations

Aihara, Ryohei. (2000). Polishing agent for semiconductor and method for its production (U.S. Patent No. 6120571). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6120571

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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