The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2000
Filed:
Aug. 11, 1998
Applicant:
Inventor:
Kouji Suzuki, Yokohama, JP;
Assignee:
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438487 ; 438478 ; 438489 ; 438487 ; 438486 ; 438150 ; 257 49 ; 257 51 ; 257 52 ;
Abstract
There is provided the method of manufacturing a polycrystalline semiconductor thin film, in which an amorphous semiconductor thin film is formed on an insulating substrate, and the amorphous semiconductor thin film is transformed into a polycrystalline semiconductor thin film. In this method, an energy beam is irradiated onto a predetermined region of the amorphous semiconductor thin film via a mask prepared by forming energy beam transmitting regions on a transparent plate as a plurality of patterns, and the region on which the energy beam is irradiated is changed so as to move the predetermined region on the amorphous semiconductor thin film in order.