The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2000
Filed:
Dec. 04, 1998
Wayne Isami Imaino, San Jose, CA (US);
Anthony Juliana, Jr, San Jose, CA (US);
Milton Russell Latta, San Jose, CA (US);
Charles H Lee, San Jose, CA (US);
Wai Cheung Leung, San Jose, CA (US);
Hal J Rosen, Los Gatos, CA (US);
James Hammond Brannon, Palo Alto, CA (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method of making a calibration disk for a laser based inspection tool (LIT) for inspecting planar surfaces is described. The calibration disk has a plurality of overlapping bumps forming a circular ring with a width of one bump. The circular ring of bumps forms a feature of a known width and position on a disk which can be used to adjust one or more LIT's to yield calibrated results. The ring of overlapping bumps is preferably formed by rotating a disk substrate under a stationary pulsing laser beam.