The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2000
Filed:
Mar. 24, 1999
Applicant:
Inventors:
Mitsuo Akutsu, Tokyo, JP;
Naohiro Kubota, Tokyo, JP;
Akifumi Masuko, Tokyo, JP;
Naoki Yamada, Tokyo, JP;
Assignee:
Asahi Denka Kogyo Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; H05H / ; C07F / ;
U.S. Cl.
CPC ...
4272553 ; 556 54 ; 556 81 ; 4272555 ; 4272556 ; 427576 ; 427581 ; 427584 ; 427587 ; 427593 ;
Abstract
A process for forming a metal oxide film by means of a chemical vapor deposition system, which comprises using a complex of a .beta.-diketone compound and a group IV metal glycolate, the complex being represented by formula (I): ##STR1## wherein M represents a metal atom of the group IV; R.sup.1 and R.sup.2 each represent a branched alkyl or cycloalkyl group having 4 to 8 carbon atoms; and R.sup.3 represents a straight-chain or branched alkylene group having 2 to 18 carbon atoms.