The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2000
Filed:
Dec. 03, 1998
Applicant:
Inventors:
Crystal J Hass, Colorado Springs, CO (US);
Patrick J Kelleher, Larkspur, CO (US);
Assignee:
LSI Logic Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02N / ;
U.S. Cl.
CPC ...
361234 ; 279128 ; 428195 ;
Abstract
The present invention provides a method for forming an electrostatic chuck. A chuck body is provided in which the chuck body includes an insulating layer. Metal is implanted into a surface of the chuck body, wherein a conductive layer of metal is formed within the insulating layer of the chuck body.