The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2000
Filed:
Jul. 12, 1996
Applicant:
Inventors:
Joseph Countrywood, Napa, CA (US);
Sohrab Zarrabian, Summit, NJ (US);
Abraham I Belkind, North Plainfield, NJ (US);
Charlie Sherwood, Pacheco, CA (US);
Frank Jansen, Walnut Creek, CA (US);
Assignee:
The BOC Group, Inc., New Providence, NJ (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H05H / ;
U.S. Cl.
CPC ...
427569 ; 118718 ; 118719 ; 1187 / ; 1187 / ; 4272481 ; 427444 ; 427523 ; 427595 ;
Abstract
A gas purged counter-electrode prevents the counter-electrode from being covered with dielectric material by flowing gas past a surface of a metal element. The gas purged counter-electrode produces a relatively high-density plasma which effectively acts as the counter-electrode for a coating system. The gas purged counter-electrodes can be used with PECVD or sputtering systems.