The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2000
Filed:
Dec. 18, 1998
Applicant:
Inventors:
Helmut Holleck, Karlsruhe, DE;
Michael Stuber, Karlsruhe, DE;
Assignee:
Forschungszentrum Karlsruhe GmbH, Karlsruhe, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20419215 ; 20419216 ;
Abstract
In a method of manufacturing a composite material structure consisting of a substrate with a layer of essentially pure sp.sup.2 - and sp.sup.3 -hybridized carbon with a sp.sup.3 -hybridized carbon proportion which increases toward the surface of the carbon layer, the carbon layer is deposited on the substrate by a PVD process using a magnetron sputtering apparatus in a process chamber in which an argon partial pressure of 0.6 to 1.0 pa is maintained and, during the carbon deposition, a bias voltage is maintained which is increased with increasing thickness of the layer from 0 to 300 volts.