The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2000
Filed:
May. 11, 1999
Applicant:
Inventor:
Andreas Ebert, La Grangeville, NY (US);
Assignee:
Fairchild Technologies USA, Inc., Dulles, VA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05C / ;
U.S. Cl.
CPC ...
118 52 ; 118 69 ; 118320 ; 427240 ;
Abstract
Disclosed is a temperature controlled dispense arm for dispensing chemicals in a spin coating machine. The temperature controlled dispense arm has a cooling portion containing cooling coils and a dispense arm base having chemical dispense passages. The temperature controlled dispense arm maintains the chemical dispense passages at a cooled temperature as determined by the cooling coils located in the cooling portion.