The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2000
Filed:
Mar. 24, 1998
Justin D Mansell, Stanford, CA (US);
Robert L Byer, Stanford, CA (US);
The Board of Trustees of the Leland Stanford Junior University, Palo Alto, CA (US);
Abstract
A high reflectance deformable mirror includes first and second substrates. The first substrate has formed therein a membrane having a bottom surface and a polished top surface. The top surface of the membrane forms the mirror surface and is preferably covered with a high reflectance coating. The first substrate also has formed therein at least one pillar for deforming the membrane. The pillar is integrally formed with the membrane and extends from the bottom surface of the membrane. The second substrate has at least one actuating member positioned thereon for actuating the pillar. Further, the first substrate is mounted to the second substrate such that the bottom surface of the membrane faces the second substrate. In a preferred embodiment, the actuating member comprises an electrode for applying an electrostatic force to the pillar. Also disclosed are single substrate embodiments of the mirror and preferred methods for producing the mirror.