The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2000
Filed:
Sep. 24, 1998
Mikiko Saito, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
A thin film magnetic head is capable of providing sufficient characteristics as an interlayer insulation layer even when a low temperature heat treatment is performed, and improving throughput of a process. The thin film magnetic head is fabricated by forming a protective layer 2 on a substrate 1, forming a lower shield 3 on the protective layer 2, forming a reading MR portion 4 on the lower shield 3, and forming an insulation layer 5 as a gap layer. A soft magnetic material layer of permalloy is formed as a common pole 6. On the common pole 6, a negative type photoresist 7 is applied. A patterning is performed by irradiating a light via an insulation layer pattern mask 9 and performing etching by a developer. Then, heat treatment is performed at a temperature lower than or equal to 200.degree. C. under inert atmosphere to form an interlayer insulation layer. Over this, a coil 8 is formed. In order to save a step, a negative type photoresist 7 is applied to form an interlayer insulation layer.