The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2000
Filed:
Jan. 12, 1998
Jurgen Kurle, Reutlingen, DE;
Kurt Weiblen, Metzingen, DE;
Stefan Pinter, Reutlingen, DE;
Horst Muenzel, Reutlingen, DE;
Helmut Baumann, Gomaringen, DE;
Dietrich Schubert, Reutlingen, DE;
Karl Bender, Tuebingen, DE;
Markus Lutz, Reutlingen, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A wafer stack with sensor elements hermetically sealed in caverns and a method of fabricating the sensors permitting a reduction in the size of the sensors formed after cutting the wafer stack and also yielding considerable savings in chip area in the manufacture of the wafer stack. The wafer stack includes bonding strips arranged between the individual sensor elements. The wafer stack is diced to form individual sensors by sawing in the middle through the bonding strips.