The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2000
Filed:
Jul. 16, 1998
Applicant:
Inventors:
Karl E Boggs, Poughkeepsie, NY (US);
Leonard C Stevens, Poughquag, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B24B / ;
U.S. Cl.
CPC ...
451 60 ; 451446 ; 366127 ;
Abstract
A chemical mechanical polishing apparatus comprises a delivery system for supplying a slurry, wherein the slurry includes suspended particles and at least one acoustic element, connected to the delivery system, the acoustic element generating sound waves for agitating the slurry and maintaining the particles in suspension.