The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2000
Filed:
Feb. 04, 1998
Shigeru Matsumoto, Osaka, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
A processing result storage device stores data on the results of an etching apparatus having processed a product. An apparatus property storage device stores data which indicate the property of the etching apparatus as processing property data. A process stability judgment device judges the stability of a step based on the processing result data stored in the processing result storage device and the apparatus property data stored in the apparatus property storage device. When the process stability judgment device has judged the step to be stable, the processing rate automatic calculation device calculates an etching rate. On the other hand, when the process stability judgment device has judged the step to be unstable, the processing rate recalculation device calculates an etching rate, based on the results of the etching apparatus having actually etched. The processing requirement determination device determines the etching requirements from the calculated etching rate.