The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2000
Filed:
Feb. 24, 1998
Applicant:
Inventors:
Tsutomu Nishiwaki, Nagano, JP;
Kouji Sumi, Nagano, JP;
Masami Murai, Nagano, JP;
Masato Shimada, Nagano, JP;
Assignee:
Seiko Epson Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; B05D / ; C03B / ;
U.S. Cl.
CPC ...
20419218 ; 20419215 ; 427100 ; 42725519 ; 42725521 ; 42725531 ; 42725532 ; 117 58 ; 117 63 ; 117 95 ; 117106 ;
Abstract
A piezoelectric thin-film device includes: a substrate; and a piezoelectric thin film formed on the substrate, wherein a thickness of the piezoelectric thin film is 1 to 10 .mu.m, a crystal grain size of the piezoelectric thin film is 0.05 to 1 .mu.m, and a surface roughness (Rmax) of the piezoelectric thin film is no more than 1 .mu.m.
Nishiwaki, Tsutomu. (2000). Piezoelectric thin-film device, process for manufacturing the same, and (U.S. Patent No. 6103072). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6103072
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile