The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2000
Filed:
Nov. 28, 1995
Applicant:
Inventors:
Min-Chung Jon, Princeton Junction, NJ (US);
Hugh Nicholl, Berthoud, CO (US);
Peter Hartpence Read, Morrisville, PA (US);
Assignee:
Lucent Technologies Inc., Murray Hill, NJ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C03C / ;
U.S. Cl.
CPC ...
134-2 ; 134-4 ; 134-6 ; 134-7 ; 134-8 ; 134 18 ; 134 27 ; 134 28 ; 134 33 ;
Abstract
Electrostatic discharges that occur during solid CO.sub.2 cleaning of a substrate (10) can be virtually eliminated by chilling the substrate so that moisture in the atmosphere, in the form of water droplets(30), condense on the substrate surface (14), thereby forming a continuous film of water (28). The water in the film (28) reacts with the solid CO.sub.2 (24) to form carbonic acid that dissociates into free ions that neutralize the charge on the solid CO.sub.2.