The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2000
Filed:
Sep. 23, 1997
William R Higdon, Pleasanton, CA (US);
Alan D Loux, Livermore, CA (US);
Hewlett-Packard Company, Palo Alto, CA (US);
Abstract
A selector valve assembly has reduced size, reduced cost, and increased repeatability with improved reliability and reduced maintenance expense due to use of a silicon micromachined valve body held in a releasable housing which in turn is mounted on a manifold plate to which are attached inlet and outlet fluid carrying tubing. The manifold plate includes two metal plates bonded together by an intervening polymer film and defining thread female connection inlets for tube fittings. The micromachined valve body is connected to a pilot valve assembly providing pneumatic operation of the micro-valves in the micromachined valve body. Also, a heater is mounted on the manifold plate to maintain temperature. The micromachined valve body is held on the manifold plate by a releasable spring-loaded assembly allowing quickly replacement of the micro-valve body in case of its failure.