The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2000
Filed:
Apr. 03, 1998
Hajime Ichikawa, Yokohama, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A magnification calibration apparatus includes an optical system optically coupled to an object surface for forming an image of the object surface, a detector for detecting the image of the object surface, and a movable support for supporting the object surface, the movable support being capable of laterally moving the object surface by a predetermined distance from a first lateral position to a second lateral position. The magnification calibration apparatus further includes a reference point recognition unit for, at each of the first and second lateral positions of the object surface, detecting the position of the image of an imaginary reference point on the object surface as a position in a detector coordinate system fixed to the detector in accordance with the image detected by the detector, and a computation unit for deriving a correspondence between an object coordinate system at the object surface and the detector coordinate system from the detected positions of the image in the detector coordinate system at the first and second lateral positions of the object surface and from the predetermined distance by which the object surface is moved from the first lateral position to the second lateral position by the movable support.