The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2000
Filed:
Jun. 15, 1998
Seiko Instruments Inc., , JP;
Abstract
A microscopic area scanning apparatus is provided with at least three hollow cylindrical piezoelectric elements each driven in three XYZ directions by one of divided electrodes. Three or more hollow cylindrical piezoelectric elements are arranged on a circumference of a common plane. Balls are each axially provided at a free end of the hollow cylindrical piezoelectric element. Ball retainers rotatably and slidably support a respective ball in contact therewith. A sample stage is fixed to the ball retainers. A table fixes the hollow cylindrical piezoelectric elements on the circumference of the common plane. Thus, the microscopic area scanning apparatus can realize both a wide X-Y scanning range and a high Z-direction resonant frequency without utilizing an elastic hinge.