The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2000
Filed:
Jul. 17, 1998
Applicant:
Inventors:
John Neal Randall, Overijse, BE;
Ming-Yih Kao, Dallas, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
H01H / ;
U.S. Cl.
CPC ...
200181 ; 200512 ; 73510 ;
Abstract
A novel micro-electro-mechanical (MEMS) RF switch having a cavity (32) in a substrate (28) which creates a spacing between a conductive membrane (34) and a bottom electrode (38). The invention eliminates the need for the dielectric posts found in prior art MEMS RF switches, includes a flexure structure (36) in the membrane (34) which will reduce the required pull down voltage for the membrane, and reduces the stress and fatigue in the membrane due to switch activation.