The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2000
Filed:
Mar. 15, 1999
Applicant:
Inventors:
Yukichi Takamatsu, Kanagawa-ken, JP;
Takeo Yoneyama, Kanagawa-ken, JP;
Yoshiyasu Ishihama, Kanagawa-ken, JP;
Assignee:
Japan Pionics Co., Ltd., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
C07F / ; C07F / ; C07F / ;
U.S. Cl.
CPC ...
556 42 ; 556 54 ; 556 76 ; 556 81 ; 556182 ; 556400 ; 568-8 ; 568 14 ;
Abstract
A purified alkoxide from which volatile impurities causing polymerization and degradation of the alkoxide are removed to extremely low concentrations. The purified alkoxide can be obtained by distilling a crude alkoxide and stripping the distilled liquid alkoxide by applying ultrasonic vibration while passing an inert gas through the liquid alkoxide. A high quality thin insulating film excellent in flatness with few defects such as voids can be obtained by using the purified alkoxide of the present invention as a CVD material.