The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2000
Filed:
Mar. 31, 1998
Applicant:
Inventors:
Talex Sajoto, Campbell, CA (US);
Jun Zhao, Cupertino, CA (US);
Charles Dornfest, Fremont, CA (US);
Leonid Selyutin, San Leandro, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118715 ;
Abstract
The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process for the deposition of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, on a silicon wafer to make integrated circuit capacitors useful in high capacity dynamic memory modules.
Published as:
WO9913545A2; WO9913545A3; US6056823A; US6063199A; US6066209A; US6077562A; US6082714A; EP1018199A2; US6096134A; US6099651A; US6123773A; US6165271A; KR20010023887A; US6258170B1; JP2001516960A; TW576872B; JP2010062575A; JP4901000B2; JP2013118402A; JP5473524B2; JP5760017B2;