The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 08, 2000

Filed:

Feb. 19, 1998
Applicant:
Inventors:

Isamu Inoue, Neyagawa, JP;

Koichi Kotera, Osaka, JP;

Osamu Matsunaga, Kyoto, JP;

Kiyohiko Kitagawa, Singapore, SG;

Takayuki Taguchi, Kadoma, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B65G / ; H01J / ;
U.S. Cl.
CPC ...
414809 ; 414391 ; 414392 ; 414396 ; 414401 ; 414940 ;
Abstract

To cope with recent LCD or PDP of larger size, an efficient transfer technology is demanded in manufacturing a larger substrate. It calls for a transfer method for such larger substrate with a less required space, and a substrate transfer cassette enabling such method. A technology is disclosed, which comprises a substrate transfer cassette (50) containing a plurality of substrates, a dolly (55) for loading the substrate transfer cassette (50), and a plurality of cassette holders (70) having a rotating arm (71) which can rotate in the vertical direction, wherein a substrate cassette (50) is transferred from a position near another cassette holder to a position near a destination cassette holder with the dolly (55), raised by the rotating arm (71) on the destination cassette holder (70) from the lower section to the upper section of the dolly (55), and moved from the dolly (55) to the cassette holder (70).


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