The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 01, 2000

Filed:

Apr. 23, 1997
Applicant:
Inventors:

Roger L Verkuil, Wappinger Falls, NY (US);

Gregory S Horner, Santa Clara, CA (US);

Tom G Miller, Solon, OH (US);

Assignee:

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R / ; G01R / ;
U.S. Cl.
CPC ...
324750 ; 2504922 ;
Abstract

A corona source is used to repetitively apply charge to an oxide layer on a semiconductor. A Kelvin probe is used to measure the resulting voltage across the layer. The tunneling field is determined based on the value of voltage at which the voltage measurement saturates.


Find Patent Forward Citations

Verkuil, Roger. (2000). Non-contact tunnelling field measurement for a semiconductor oxide layer (U.S. Patent No. 6097196). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6097196

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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