The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2000
Filed:
May. 21, 1999
Applicant:
Inventor:
Atsushi Takizawa, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
257797 ; 257620 ;
Abstract
A reticle has a transfer region and a peripheral region defined in the plane of the reticle, the transfer region being formed with a pattern to be transferred and the peripheral region being disposed surrounding the periphery of the transfer region. Reference marks for defining one virtual reference line is formed in the plane of the reticle. A transfer pattern is formed in the transfer region and includes a long linear line segment oblique to the reference line. A pair of direction designating marks is disposed in the peripheral region along a virtual straight line parallel or perpendicular to the linear line segment of the transfer pattern.