The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2000
Filed:
Feb. 11, 1998
Hag-Ju Cho, Seoul, KR;
Abstract
Methods of forming integrated circuit capacitors include the steps of forming a capacitor comprising first and second electrodes and a dielectric layer between the first and second electrodes, on a substrate. A step is then performed to expose at least one of the dielectric layer and the second electrode to an ECR plasma for a duration of sufficient length to improve charge leakage characteristics of the integrated circuit capacitor. The dielectric layer may comprise STO, BST, PZT, SBT PLZT and BTO, for example. This exposing step may include the step of selectively exposing the second electrode, but not the ferroelectric dielectric layer, to the ECR plasma. The exposing step also preferably includes simultaneously maintaining the substrate at a temperature below about 700.degree. C.