The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2000
Filed:
Jul. 27, 1998
Masatoshi Yasutake, Chiba, JP;
Akira Inoue, Chiba, JP;
Fumiki Sakai, Chiba, JP;
Kazutoshi Watanabe, Chiba, JP;
Tatsuya Miyatani, Chiba, JP;
Seiko Instruments Inc., , JP;
Abstract
An xy scanning unit produces a scanning signal along an x-direction and a scanning signal along a y-direction, which are determined by a contour of a sample to be monitored, scanning time of the x-direction, and a pixel number of the x-direction, supplied from a CPU. Then, the xy scanning unit outputs these scanning signals along the x-direction and the y-direction to a piezoelectric scanning apparatus. On the other hand, a second oscillator outputs a sine wave signal having a frequency determined by the scanning time of the x-direction and the pixel number of the x-direction to a second piezoelectric plate. A sample/hold circuit holds observation data of a probe at such timing after preselected time has passed since the output of the second oscillator becomes maximum, and then outputs the held observation data to a differential amplifier and a P.I control system. An output signal Q of the P.I control system is applied to a z-fine-moving electrode of the piezoelectric scanning apparatus, and also is converted into a digital signal by an A/D converter. This digital signal is stored into a memory in a sampling manner.