The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2000
Filed:
Jun. 28, 1999
Masashige Mitsuhashi, Tokyo, JP;
Kenichi Ohno, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
A surface polishing machine includes a polishing tool having a polishing tool face, a pressurizing member, placed on and movable in unison with a workpiece placed on the annular polishing tool, for pressurizing the workpiece toward the polishing tool, and a polishing-position retaining mechanism for holding the workpiece at a predetermined polishing position by preventing it from moving in unison with the polishing tool, while permitting it to rotate, as the polishing tool rotates. To reduce the overall size of the polishing machine and carry out highly accurate polishing, the polishing tool has its diameter larger than the diameter of the workpiece and smaller than twice the workpiece diameter. Alternatively, the polishing tool face is formed with an annular groove coaxially with the center of rotation of the polishing tool so that the annular groove extends to pass through the center of rotation of the workpiece placed on the polishing tool.