The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2000
Filed:
Aug. 04, 1998
Applicant:
Inventor:
Yasushi Amamiya, Tokyo, JP;
Assignee:
NEC Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01G / ; H01G / ;
U.S. Cl.
CPC ...
3613063 ; 361311 ; 361329 ;
Abstract
An obstacle is opposed to a lower electrode of a metal-insulator-metal capacitor so as to form a gap therebetween, thereafter, insulating material is deposited so as to fill the gap and form a dielectric layer of the metal-insulator-metal capacitor; even if the deposition does not achieve a conformal step coverage, the insulating material in the gap surely isolates the lower electrode from the upper electrode, and the lower electrode is never short-circuited with the upper electrode.