The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2000
Filed:
Oct. 20, 1997
Applicant:
Inventors:
Won B Bang, San Jose, CA (US);
Matthew W Losey, Cambridge, MA (US);
Francimar Campana, Milpitas, CA (US);
Srinivas Nemani, San Jose, CA (US);
Sundar Pichai, Santa Clara, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; F16K / ;
U.S. Cl.
CPC ...
118715 ; 251309 ; 36446828 ;
Abstract
A throttle valve assembly is provided, including a throttle valve housing having a bore therethrough and a throttle valve plug assembly. The throttle valve plug assembly includes a shaft rotatably mounted on the throttle valve housing and a throttle valve plug having a concave cut-out portion. The throttle valve plug is mounted on the shaft within the throttle valve housing and substantially perpendicular to the bore. The throttle valve plug has at least two fully open positions and a closed position.