The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2000
Filed:
Jul. 11, 1997
Frederik W Freerks, Cupertino, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A vacuum processing system may have a two-piece slit valve door, including a seal plate mounted on a mounting member, for closing the slit valve in a vacuum chamber. The seal plate, the piece that actually contacts the slit valve, may have a molded-in-place seal for making the contact and preventing metal-to-metal contact between the door and the valve. The seal may have a parabolic profile and be adhesively bonded within a groove in order to enhance its compressive and sealing capabilities. The seal plate may be removable for ease of service or replacement. Any particles generated by metal-to-metal contact between the seal plate and its mounting member may be captured by an O-ring statically sealed around the periphery between the two pieces.