The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2000
Filed:
Jun. 15, 1998
Applicant:
Inventor:
Steven Carter, Weston-Super-Mare, GB;
Assignee:
Trikon Equipments Limited, Newport, GB;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F23D / ; B05B / ;
U.S. Cl.
CPC ...
239422 ; 239424 ;
Abstract
This invention relates to showerheads for delivering gases to reactor chambers. The showerhead 18 comprises a casing 19, which includes a backing plate 20, first and second baffle plates 21, 22 and an outlet plate 23. Baffle plates 21 and 22 divide the volume defined by the casing 19 into plena 24, 25 and 26. A gas supply 27 feeds the plenum 24, a gas supply 28 feeds the plenum 25 and a further gas supply 29 feeds the plenum 26. The outlet plate 23 has an array of openings 30 and each of the baffle plates 21, 22 has a tube for each opening 31. The tubes and outlets together define concentric but separate outlets for the respective plena.