The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2000
Filed:
Jun. 21, 1999
Applicant:
Inventors:
Li Chen, Fremont, CA (US);
Raj Chhibber, San Jose, CA (US);
Assignee:
Phase Metrics, Inc., San Diego, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
3562372 ; 3562397 ;
Abstract
An optical inspection station for inspecting a substrate. The substrate may include a first surface and a second surface. Light is reflected from both the first and second surfaces of the substrate. The light reflected from the first surface is detected by a light detector. A controller may determine a surface characteristic of the first surface from the detected light. The system may include a spatial filter that filters the light reflected from the second surface. The spatial filter eliminates the optical noise that may be created by the light reflected from the second surface.