The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2000
Filed:
Apr. 11, 1997
Niels Due Jensen, Bjerringbro, DK;
Tina Romedahl Brown, Bjerringbro, DK;
Karsten Dyrbye, Bjerringbro, DK;
Per Ellemose Andersen, Bjerringbro, DK;
Grundfos A/S, Bjerringbro, DK;
Abstract
The invention relates to a pressure or differential pressure sensor comprising a membrane with at least one measuring element located thereon, as well evaluation electronics for measuring the membrane deflection. The membrane is covered against environmental influences with a protective layer and is gripped within a mounting in a pressure tight manner. The protective layer is composed of a fluid tight amorphous metal layer, a so called metal glass layer which with the interposing of an electrically insulating layer, is directly deposited onto the membrane, the measuring element located thereon and where appropriate, onto further electronic components located thereon. In this manner, on the one hand, the membrane is protected but on the other hand it may be deflected sensitively since the amorphous metal layer is fluid and gas tight even with layer thicknesses in the .mu.m region.