The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2000
Filed:
May. 11, 1998
Applicant:
Inventor:
Genco Genov, deceased, late of San Jose, CA (US);
Assignee:
Genmark Automation, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B25J / ;
U.S. Cl.
CPC ...
700218 ; 414222 ; 4147441 ; 901-3 ; 901-9 ; 901 16 ; 901 30 ;
Abstract
A planarity teaching station includes one or more proximity sensors arranged to reflect light off a surface to determine a plane in which a substrate is positioned by a robotic arm. The plane of the substrate is then automatically adjusted by changing a Z-axis of a universally tiltable robot base or in another manner, based on the data provided by the planarity teaching station. The adjustment of the substrate or end effector plane allows substrates to be removed from and delivered to various cassettes and workstations of a substrate processing system without damage to the substrate caused by end effector misalignment.