The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2000
Filed:
Jul. 02, 1998
Applicant:
Inventors:
Naoaki Sakurai, Yokohama, JP;
Hisashi Nishigaki, Yokohama, JP;
Naoya Hayamizu, Yokohama, JP;
Hiroshi Fujita, Yokohama, JP;
Assignee:
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Primary Examiner:
Int. Cl.
CPC ...
B08B / ; B08B / ; B08B / ; B03C / ;
U.S. Cl.
CPC ...
134-1 ; 134-2 ; 134-3 ; 134 26 ; 134 31 ; 134 36 ; 1341021 ; 1341022 ;
Abstract
Provided is a cleaning method for effectively removing particles on the surface of an object to be cleaned. This cleaning method includes dissolving oxygen into deaerated pure water to prepare a cleaning fluid, and cleaning an object to be cleaned by bringing the object into contact with the cleaning fluid to which ultrasonic vibration is being applied.