The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2000
Filed:
Sep. 16, 1998
Dean M Aslam, Okemos, MI (US);
Sondes Sahli, Sacramento, CA (US);
Board of Trustees operating Michigan State University, East Lansing, MI (US);
Abstract
A miniature piezoresistive sensor includes an undoped single crystal and a doped diamond film deposited by a chemical vapor deposition process on the undoped polycrystalline diamond and having a single crystal grain size of about 1 micron to 1 millimeter. The sensor preferably includes metal contacts in contact with the doped film. The resistance of the sensor varies as a function of strain on the doped diamond film transmitted through the single grain. This inexpensive highly-sensitive sensor can be used for sensing pressure, acceleration, strain or weight. It can also be used as a thermistor.